Thursday 19 January 2012

Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)

Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)

Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of thei

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